KASHIYAMA SDL Series真空泵

KASHIYAMA SDL Series真空泵

参考价: 面议

具体成交价以合同协议为准
2024-01-21 14:17:28
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上海尔迪仪器科技有限公司

上海尔迪仪器科技有限公司

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产品简介

KASHIYAMA SDL Series真空泵

详细介绍

SDL Series

01
FEATURE

Available to large size wafer & FPD

Large capacity available
by combination.
Larger than 150kL/min
also available on demand.

02
FEATURE

Shorter cycle-time


Large capacity around atm. pressure can achieve high speed pumping best for large L/L chamber.

SDL Series

Pumps for solvent evacuation are also lined-up

Major Products

Spec. / ProductsSDL12E50SDL20E50SDL36M60SDL40E60SDL40E201SDL40EW201SDL80201
Max. pumping speed
[L/min] *1
25,00050,00060,00070,00080,000150,000170,000
Ultimate pressure
[Pa] *1
0.80.50.85.0
Supply voltage
(50/60Hz)
3Phase AC200~220V, 380~480V3Phase AC380~440V

*1) Without N2 purge.
* Contact us about international standard compliance. Spec. & name of products are subject to change without prior notice.

S-P Curve

S-P Curve

* S-P curves vary by combination.


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