Z514, Z524 DevicenetTM
Mass Flow Controller / Meter
Mass flow controller model *1 SEC-Z514KX SEC-Z514MGX SEC-Z524MGXN SEC-Z524MGX
Mass flow meter model *1 SEF-Z514KX SEF-Z514MGX SEF-Z524MGXN SEF-Z524MGX
Full-scale flow rate MR/MG number
(N2 conversion flow rate) #R01:10SCCM
#R1.5:17.5SCCM
#01:30SCCM
#1.5:55SCCM
#02:100SCCM
#2.5:175SCCM
#03:300SCCM
#3.5:550SCCM
#04:1SLM
#4.5:1.75SLM
#05:3SLM
#5.5:5.5SLM
#06:10SLM
Valve Type
Flow rate at fully closed control valve
Flow rate control range
Flow rate measuring range (SEF)
Operating temperature
Response
Linearity
Repeatability
50 to 300 kPa (d)
#5.5, #06: 100 to 300 kPa (d)
Operating differential pressure (SEF)
MAX. Operating pressure
Pressure resistance
Leak Integrity
Digital interface
Wetted materials
Power supply
1/4 inch VCR equivalent
Option: 1.125 inch IGS
Mounting orientation
*1 The gas type and full scale settings for the SEC(SEF)-Z514MGX and Z524MGXN can be changed by
the operator, using special software.
*2 The flow rate precision guaranteed temperatures conform to SEMI E56-1296 standards. The precision is that
associated with the full-scale MR and MG number values.
*3 IGS: Integrated Gas System
* SCCM and SLM are notations indicating the gas flow rate (mL/min, L/min, at 0°C and 101.3 kPa).
≤ 2% F.S.
2-99% of F.S.
0-99% of F.S.
≤ 1 second: Over full flow rate range
≤ ±0.5% F.S.
≤ ±0.2% F.S.
±0.25% F.S. (Flow rate ≤ 25% F.S.)
Conforming to ODVA standards, DC 24 V, 4.0 VA
450kPa(g)
Operating differential pressure 50 to 300 kPa (d) 200 to 300 kPa (d)
≤ 300 kPa (d)
1000kPa(g)
≤ 5 x 10-12Pa·m3/s (He)
DeviceNet™ Protocol
316L Stainless Steel (polished surface)
Standard Fitting *3 1/4 inch VCR equivalent 1.5 inch IGS
Free
Option: 1.125 inch IGS, 1.5 inch IGS
1/2SCCM
MR/MG number
O: Normally open C: Normally closed
#6.5:22SLM
#07:30SLM
#08:50SLM
Accuracy *2 ±1.0%F.S. ±1.0% S.P. (Flow rate > 25% F.S.)
5 to 50°C (recommended temperature range: 15 to 45°C)
Z514/524 Web Ver.001
Subject to change without notice.